2:30 PM - 2:45 PM
[17p-C204-6] Pulse-power and discharge-mode dependences for plasma emissions generated by high-power pulsed magnetron sputtering (HPPMS)
Keywords:magnetron sputtering, plasma diagnostics, optical measurement
Emission spectra of plasma generated direct current magnetron sputtering (dcMS) and high-power pulsed magnetron sputtering (HPPMS) were measured in the range of 0.3 to 0.7 kW with the interval of 0.1 kW by using of the HPPMS apparatus for hard-coating processing.
For the same discharge power, the difference emission spectra between HPPMS and dcMS
show the dominant wavelength region for luminescent species: Ti+ ion and Ti atom. The results are discussed in relation to the electronic structures of the luminescent species.
For the same discharge power, the difference emission spectra between HPPMS and dcMS
show the dominant wavelength region for luminescent species: Ti+ ion and Ti atom. The results are discussed in relation to the electronic structures of the luminescent species.