Hiroshi Nishida

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Speaker, Author, Co-Author

Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[17p-C204-1~20] 8.1 Plasma production and diagnostics

2:30 PM - 2:45 PM

[17p-C204-6] Pulse-power and discharge-mode dependences for plasma emissions generated by high-power pulsed magnetron sputtering (HPPMS)

〇(B)Hiroshi Nishida¹, Koichi Matsuda¹, Tomonori Syoji¹, Bizi Ichikawa¹, Takumi Oshiro¹, Masaomi Sanekata¹, Hiroaki Yamamoto², Masahide Tona², Keizo Tsukamoto², Motoyoshi Nakano³, Keijiro Ohshimo³, Fuminori Misaizu³ (1.Tokyo Polytechnic Univ., 2.Ayabo Corp, 3.Tohoku Univ.)

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