Numerical trajectory analysis of high-energy negative ion in magnetron plasma

Presentation information

Oral presentation

8 Plasma Electronics » 8.1 Plasma production and diagnostics

Sat. Mar 17, 2018 1:15 PM - 6:30 PM C204 (52-204)

3:00 PM - 3:15 PM

〇(M1)Kou Udagawa¹, Akihiro Mitsuya¹, Haruka Suzuki¹, Hirotaka Toyoda¹ (1.Nagoya Univ.)

Keywords:Magnetron sputtering, High Energy Particles, Negative oxygen ions