[Young Scientist Presentation Award Speech] Physical origins of slow traps for ALD high-k dielectrics on GeO<sub>x</sub>/Ge interfaces

Presentation information

Oral presentation

13 Semiconductors » 13.3 Insulator technology

Sat. Mar 17, 2018 1:45 PM - 6:15 PM F206 (61-206)

Tomo Ueno(TUAT), Akio Ohta(Nagoya Univ.)

1:45 PM - 2:00 PM

〇Mengnan Ke¹, Kimihiko Kato¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Tokyo Univ.)

Keywords:Ge, slow trap density, semiconductor