The 65h JSAP Spring Meeting, 2018

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13 Semiconductors » 13.3 Insulator technology

[17p-F206-1~17] 13.3 Insulator technology

Sat. Mar 17, 2018 1:45 PM - 6:15 PM F206 (61-206)

Tomo Ueno(TUAT), Akio Ohta(Nagoya Univ.)

6:00 PM - 6:15 PM

[17p-F206-17] XPS Study of Chemical Bonding Features and Inner Potential at Y2O3/SiO2 Interfaces

〇Nobuyuki Fujimura1, Akio Ohta1, Mitsuhisa Ikeda1, Katsunori Makihara1, Seiichi Miyazaki1 (1.Nagoya Univ.)

Keywords:XPS, Dipole