[17p-F206-1~17] 13.3 絶縁膜技術

▼ [17p-F206-2] Kinetic Model for Thermal Oxidation of Germanium

〇Wang Xu¹、Tomonori Nishimura¹、Takeaki Yajima¹、Akira Toriumi¹ (1.Tokyo Univ.)

キーワード：Germanium, Thermal Oxidation