The 65h JSAP Spring Meeting, 2018

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13 Semiconductors » 13.7 Compound and power electron devices and process technology

[17p-P12-1~27] 13.7 Compound and power electron devices and process technology

Sat. Mar 17, 2018 4:00 PM - 6:00 PM P12 (P)

4:00 PM - 6:00 PM

[17p-P12-4] GaN surface treatment of TMAH with varying dilution solvent

〇Go Imakuma1, Kouta Uzaki1, Satoko Shinkai2 (1.Kyutech, 2.CMS)

Keywords:GaN, TMAH, surface treatment