[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

△ [17p-P7-12] Improvement of wavelength selectivity of plasmonic color filter using Metal-Insulator-Metal subwavelength grating

〇Atsuya Hirata¹, Masato Mitsudome¹, Kazuaki Sawada¹, Kazuhiro Takahashi¹ (1.Toyohashi Univ)

Keywords:MEMS