[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-P7-13] Silicon-based Nano-hole IR Detector with Supercritical Fluid Deposition of Copper

〇(M1)Shun Yasunaga¹, Hidetoshi Takahashi¹, Tetsuo Kan², Takuya Tsukagoshi¹, Takeshi Momose¹, Tomoyuki Takahata¹, Isao Shimoyama¹ (1.The Univ. of Tokyo, 2.The Univ. of Electro-Communications)

Keywords:MEMS, Infrared, Schottky junction

We fabricated a silicon-based infrared detector with holes, that are several-hundred-nanometers in scale and are covered with copper layer made with supercritical fluid deposition. The device indicated improvement in responsivity.