The 65h JSAP Spring Meeting, 2018

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13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Sat. Mar 17, 2018 1:30 PM - 3:30 PM P7 (P)

1:30 PM - 3:30 PM

[17p-P7-15] 4T Self-Aligned Cu-MIC Poly-Ge1-xSnx TFTs on Glass Substrates

〇Ryo Miyazaki1, Naoki Nisiguchi1, Hiroki Utumi1, Akito Hara1 (1.Tohoku Gakuin Univ.)

Keywords:Germanium Tin, Four-terminal thin film transistor