1:30 PM - 3:30 PM
△ [17p-P7-16] Self-Aligned Double-Gate Cu-MIC Poly-Ge1-xSnx TFT on a Glass Substrate
Keywords:thin film transistor, GeSn, metal induced crystallization
Presentation information
Poster presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
[17p-P7-1~21] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Sat. Mar 17, 2018 1:30 PM - 3:30 PM P7 (P)