The 65h JSAP Spring Meeting, 2018

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Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[18a-C102-1~11] 6.3 Oxide electronics

Sun. Mar 18, 2018 9:00 AM - 12:00 PM C102 (52-102)

Yasushi Hirose(Univ. of Tokyo)

10:15 AM - 10:30 AM

[18a-C102-6] Preparation of Ta-doped SnO2 thin films by DC Sputtering

〇Michio Mikawa1, Kunihiko Nakata2 (1.National Inst. of Tech. Kagawa College ,, 2.Sumitomo Chemical Co., Ltd.)

Keywords:transparent conducting oxide