The 65h JSAP Spring Meeting, 2018

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Oral presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[18a-C102-1~11] 6.3 Oxide electronics

Sun. Mar 18, 2018 9:00 AM - 12:00 PM C102 (52-102)

Yasushi Hirose(Univ. of Tokyo)

11:00 AM - 11:15 AM

[18a-C102-8] Epitaxial fluorine doped SnO2 thin films grown by mist CVD

〇Taichi Okumura1, Hiroyuki Nishinaka1, Yoshimoto Masahiro1 (1.Kyoto Inst. of Tech)

Keywords:mist cvd, epitaxial growth, tin oxide