[18a-C204-1~5] 8.6 Plasma Electronics English Session

▲ [18a-C204-5] Filtering of clusters with cluster cloud in CVD plasmas

〇Masaharu Shiratani¹, Takashi Kojima¹, Susumu Toko¹, Kazuma Tanaka¹, Hyunwoong Seo¹, Naho Itagaki¹, Kazunori Koga¹ (1.Kyushu Univ.)

Keywords:plasma CVD, nanoparticle, thin film

We propose a new method for controlling amount of cluster incorporation into thin films by using cluster cloud as a cluster filter in CVD plasmas. Cloud of clusters of an appropriate size and number density works well as a filter by which clusters are trapped. This filter has unique features of a dynamic filter which can be replaced in situ.