The 65h JSAP Spring Meeting, 2018

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15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects

[18a-D103-1~10] 15.7 Crystal characterization, impurities and crystal defects

Sun. Mar 18, 2018 9:00 AM - 11:45 AM D103 (56-103)

Toshiaki Ono(SUMCO), Hiroki Kawai(Toshiba)

9:30 AM - 9:45 AM

[18a-D103-3] CO concentration in CZ furnace (II)

〇Yoshiji Miyamura1, Hirofumi Harada1, Satoshi Nakano1, Koichi Kakimoto1 (1.Kyushu Univ.)

Keywords:Silicon, CZ, Carbon

We investigated CO concentration in CZ furnace by using gas chromatograph. CO concentration was measured under various conditions of pressure, argon gas flow rate and distance between radiation shield and silicon melt. The CO concentration in quartz crucible is considered to be influenced by the argon gas flow.