[18a-D103-1~10] 15.7 Crystal characterization, impurities and crystal defects

[18a-D103-4] Impact of CO Generation during Melting Process on Carbon Concentration in Czochralski Silicon

〇Yuta Nagai¹, Hiroyuki Tsubota¹, Hisashi Matsumura¹ (1.GlobalWafers Japan)

Keywords:Silicon, Crystal growth, Carbon concentration