[18a-E201-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18a-E201-4] Analysis of the interface between IGZO and ionic liquid, and the effect of Self-assembled Mono interlayer

〇Kenta Komori¹, Hiromi Okada¹, Mami Fujii¹, Kazumoto Miwa², Shimpei Ono², Bermundo Juan Paolo Soria¹, Yasuaki Ishikawa¹, Yukiharu Uraoka¹ (1.NAIST, 2.CRIEPI)

Keywords:Ionic Liquid, Self-Assembled Monolayer