[18a-E201-1~11] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[18a-E201-3] Development of a highly sensitive gas sensor based on titanium dioxide nanotube

〇Hiroyuki Abe¹, Ma Teng², Daisuke Tadaki³, Ayumi Hirano-Iwata^2,3, Yasuo Kimura⁴, Michio Niwano⁵ (1.ITIM, 2.AIMR, Tohoku Univ., 3.RIEC, Tohoku Univ., 4.Tokyo Univ. of Tech., 5.Tohoku Fukushi Univ.)

Keywords:gas sensor, anodization, titanium dioxide nanotube

In order to improve sensitivity and response and recovery times of the gas sensor, we established a basic technology for manufacturing a gas sensor which has the structure of detected gas passing through a titanium oxide nanotube thin film. It is confirmed that the response time can be shortened as compared with the gas sensor in previous study.