[18a-F202-1~10] 1.3 Novel technologies and interdisciplinary engineering

[18a-F202-8] Fabrication of all-ceramics gas sensor using conducting oxide

〇Akihiro Tsuruta¹, Toshio Itoh¹, Masashi Mikami¹, Yoshiaki Kinemuchi¹, Ichiro Terasaki^1,2, Norimitsu Murayama¹, Woosuck Shin¹ (1.AIST, 2.Nagoya Univ.)

Keywords:conducting oxide, gas sensor

We are paying attension to conducting oxide CaCu₃Ru₄O₁₂ as a Pt substitute conponent in high temperature operation type electronic device. We have made a prototype semiconductor type gas sensor using CaCu₃Ru₄O₁₂ as electrode and heater component. We will present the sensing performance and heater characteristics.