9:00 AM - 9:15 AM
[18a-F206-1] Effects of Ar introduction on uniformity of diamond growth
Keywords:diamond, CVD, uniformity
Oral presentation
6 Thin Films and Surfaces » 6.2 Carbon-based thin films
Sun. Mar 18, 2018 9:00 AM - 11:30 AM F206 (61-206)
Hideo Isshiki(UEC Tokyo)
9:00 AM - 9:15 AM
Keywords:diamond, CVD, uniformity