The 65h JSAP Spring Meeting, 2018

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Oral presentation

6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[18a-F206-1~9] 6.2 Carbon-based thin films

Sun. Mar 18, 2018 9:00 AM - 11:30 AM F206 (61-206)

Hideo Isshiki(UEC Tokyo)

9:45 AM - 10:00 AM

[18a-F206-4] High-Quality Epitaxial Films Grown on Diamond Crystal Treated by CMP Process

〇Daiki Fujii1, Satoshi Masuya2, Koki Oyama1, Hidetoshi Takeda1, Yutaka Kimura1, Seongwoo Kim1, Makoto Kasu2 (1.Adamant Namiki Precision Jewel Co., Ltd., 2.Saga Univ.)

Keywords:diamond, CMP, epitaxial growth