The 65h JSAP Spring Meeting, 2018

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6 Thin Films and Surfaces » 6.6 Probe Microscopy

[18a-F210-1~13] 6.6 Probe Microscopy

6.6と12.2のコードシェアセッションあり

Sun. Mar 18, 2018 9:00 AM - 12:30 PM F210 (61-210)

Satoshi Katano(Tohoku Univ.)

9:45 AM - 10:00 AM

△ [18a-F210-4] Observation of an n- layer of Si fast recovery diode by Kelvin probe force microscopy

〇(D)Takeshi Uruma1, Nobuo Satoh2, Hidekazu Yamamoto2, Futoshi Iwata1 (1.Graduate School of Sci. and Tech., Shizuoka Univ., 2.Chiba. Ins. of Tech.)

Keywords:Operand measurement, Power device, Kelvin probe force microscopy