9:45 AM - 10:00 AM
△ [18a-F210-4] Observation of an n- layer of Si fast recovery diode by Kelvin probe force microscopy
〇(D)Takeshi Uruma1, Nobuo Satoh2, Hidekazu Yamamoto2, Futoshi Iwata1 (1.Graduate School of Sci. and Tech., Shizuoka Univ., 2.Chiba. Ins. of Tech.)