[18a-G202-1~12] 12.5 Organic solar cells

[18a-G202-1] Fabrication of Perovskite Solar Cells with ITO obtained by Activated Reactive Evaporation using Pressure Gradient Type Plasma Gun

〇Takeshi Tanaka¹, Noriaki Hashimoto², Eiji Furuya², Masami Nakagawa¹, Yoshiharu Kakehi¹, Takashi Mori¹, Yoshiharu Yamada¹, Yusuke Kondo¹ (1.ORIST, 2.Chugairo Co., LTD.)

Keywords:Perovskite Solar Cell, ITO, Activated Reactive Evaporation using Pressure Gradient Plasma Gun

ITO (5.1 nm/sec, 215 nm) obtained by activated reactive evaporation using a pressure gradient type plasma gun and Ag (0.2 nm/sec, 100 nm) obtained by vacuum evaporation were applied as bottom electrode of perovskite solar cells (PSCs). There was no difference in the power conversion efficiency (ITO: 14.2%, Ag: 14.4%) of the both PSCs. Therefore, it is estimated that no damage is caused to other layers of PSC during ITO film formation.