[18a-P3-1~14] 7 Beam Technology and Nanofabrication（Poster）

[18a-P3-12] One-nozzle two-hyperthermal beam system using thin PSVs

〇KUMIKO YOKOTA¹, TEPPEI SHIMIZU¹, RYOTA OKURA¹, YUSUKE FUJIMOTO¹, KAZUKI KITA¹, CHEE SZE KEAT², MINORU IWATA³, MASAHITO TAGAWA¹ (1.Kobe Univ., 2.Mechano Transformer Corp., 3.Kyushu Inst. of Tech.)

Keywords:hyperthermal atomic beam