[18a-P3-1~14] 7 Beam Technology and Nanofabrication（Poster）

[18a-P3-13] Fabrication of self-standing thin film with small through holes by imprint process

〇Keito Uchida¹, Hiroaki Kawata¹, Masaaki Yasuda¹, Yoshihiko Hirai¹ (1.Osaka Pref. Univ.)

Keywords:imprint, self-standing thin film