Surface Ablation by Soft X-ray Laser Pulse for EUV nano-scale fabrication

Masaharu Nishikino; Masahiko Ishino; Dinh T-H; Noboru Hasegawa; Faenov A; Pikuz T; Satoshi Ichimaru; Hiroo Kinoshita; Kazuyuki Sakaue; Takeshi Higashiguchi; Yuichi Inubushi; Akira Kon; Shigeki Owada; Tadashi Hatano; Masakazu Washio; Toru Suemoto; Tetsuya Kawachi

Presentation information

Symposium (Oral)

Symposium » Progress in studies on mterial conversion and processing with high-power lasers

[18p-A404-1~12] Progress in studies on mterial conversion and processing with high-power lasers

Sun. Mar 18, 2018 1:15 PM - 6:00 PM A404 (54-404)

Yoichiroh Hosokawa(NAIST), Masaaki Sakakura(Univ. of Southampton), Masayuki Kakehata(AIST)

2:00 PM - 2:30 PM

[18p-A404-3] Surface Ablation by Soft X-ray Laser Pulse for EUV nano-scale fabrication

〇Masaharu Nishikino¹, Masahiko Ishino¹, Dinh T-H¹, Noboru Hasegawa¹, Faenov A², Pikuz T², Satoshi Ichimaru³, Hiroo Kinoshita⁴, Kazuyuki Sakaue⁵, Takeshi Higashiguchi⁶, Yuichi Inubushi⁷, Akira Kon⁷, Shigeki Owada⁸, Tadashi Hatano⁹, Masakazu Washio⁵, Toru Suemoto¹⁰, Tetsuya Kawachi¹ (1.QST, 2.Osaka Univ., 3.NTT-AT, 4.Univ. Hyogo, 5.Waseda Univ., 6.Utsunomiya Univ., 7.JASRI, 8.Riken, 9.Tohoku Univ., 10.TPCRI)

Keywords:x-ray laser, ablation