The 65h JSAP Spring Meeting, 2018

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Symposium (Oral)

Symposium » Fundamentals and applications of piezoelectric thin-film devices

[18p-C104-1~9] Fundamentals and applications of piezoelectric thin-film devices

Sun. Mar 18, 2018 1:00 PM - 5:00 PM C104 (52-104)

Isaku Kanno(Kobe Univ.), Takeshi Yoshimura(Osaka Pref. Univ.)

4:30 PM - 4:45 PM

△ [18p-C104-8] ScAlN thick film transducer operating at 40 MHz

〇Chiaki Masamune1, Ko-hei Sano1, Takahiko Yanagitani1,2,3 (1.Waseda Univ., 2.IST PRESTO, 3.ZAIKEN)

Keywords:ScAlN piezoelectric film, Ultrasonic transducer, Ultrasonic microscope