ScAl alloy spattering target for ScAlN thin film growth synthesized by e-beam vacuum melting

Presentation information

Symposium (Oral)

Symposium » Fundamentals and applications of piezoelectric thin-film devices

Sun. Mar 18, 2018 1:00 PM - 5:00 PM C104 (52-104)

Isaku Kanno(Kobe Univ.), Takeshi Yoshimura(Osaka Pref. Univ.)

4:15 PM - 4:30 PM

〇Yuka Endo¹, Kohei Sano¹, Rei Karasawa¹, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.JST PRESTO, 3.ZAIKEN)

Keywords:ScAlN films