[18p-C104-1~9] Fundamentals and applications of piezoelectric thin-film devices

△ [18p-C104-6] Evaluation method of electromechanical coupling coefficient k_t² of film/substrate structure by using the ratio of a third resonant frequency to the first resonant frequency

〇Makoto Totsuka^1,2, Takahiko Yanagitani^1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST PRESTO)

Keywords:film/substrate structure, electromechanical coupling coefficient, resonant frequency