3:30 PM - 4:00 PM
[18p-C204-5] MoS2 film formation by sputtering, and transistor applications
Keywords:Semiconductor
Presentation information
Symposium (Oral)
Symposium » Synthesis and plasma processing for 2D sheet materials -from ultra-thin films to atomically thin layered materials-
[18p-C204-1~9] Synthesis and plasma processing for 2D sheet materials -from ultra-thin films to atomically thin layered materials-
Sun. Mar 18, 2018 1:45 PM - 6:00 PM C204 (52-204)
Makoto Kambara(Univ. of Tokyo), Toshiaki Kato(Tohoku Univ.)