[18p-C303-1~8] Polarization imaging for lightwave sensing

[18p-C303-6] Spectroscopic ellipsometry using optical comb

〇Takeo Minamikawa^1,2, Takeshi Yasui^1,2 (1.Tokushima Univ., 2.JST-ERATO)

Keywords:Optical comb, Spectroscopic ellipsometry, Polarization measurement

Spectroscopic ellipsometry is now widely used for investigating optical properties of material surfaces and thin films. In this study, we proposed novel spectroscopic ellipsometry employing optical comb. Our proposed method enables the ellipsometric evaluation with ultra-high spectral resolution, wide spectral range and no polarization modulation, beyond the conventional limit. We performed the ellipsometric evaluation of optical components and thin films, and demonstrated its capacity for the materla evaluation.