[18p-C303-1~8] Polarization imaging for lightwave sensing

[18p-C303-5] Ellipsometry by the spin Hall effect of light and its application

〇Yasuhiro Mizutani¹, Hiroyuki Fujita¹, Yasuhiro Takaya¹ (1.Osaka Univ.)

Keywords:ellipsometry, spin Hall effect of light, surface roughness detection

We propose a novel quantum ellipsometry which can evaluate surface roughness of a sample using the spin Hall effect of light (SHEL). For higher accuracy, we provide an imaging based ellipsometer by analyzing a nano-order shifting of the SHEL caused by spin-orbit interaction and depended on a surface condition of a sample. In order to measure the surface geometry in the horizontal direction, we measured the SHEL shift corresponding to known surface coverage of $¥rm{SiO_2}$ particles. After confirming the correlatio between SHEL and coverage of particles, we applied to scanning measurement of Au island film.