The 65h JSAP Spring Meeting, 2018

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6 Thin Films and Surfaces » 6.2 Carbon-based thin films

[18p-F206-1~15] 6.2 Carbon-based thin films

Sun. Mar 18, 2018 1:45 PM - 6:00 PM F206 (61-206)

Tsuyoshi Yoshitake(Kyushu Univ.), Hitoshi Umezawa(AIST)

1:45 PM - 2:00 PM

△ [18p-F206-1] Electrical Properties of Heteroepitaxial Diamond SBDs on 3C-SiC/Si Substrates

〇Takuya Murooka1, Junya Yaita1, Takayuki Iwasaki1, Toshiharu Makino2, Masahiko Ogura2, Hiromitsu Kato2, Meralys Natal3, Stephen E. Saddow3, Satoshi Yamasaki2, Mutsuko Hatano1 (1.Tokyo Tech., 2.AIST, 3.Univ. of South Florida)

Keywords:Diamond, Schottky Barrier Diode, 3C-SiC