[18p-F206-1~15] 6.2 Carbon-based thin films

[18p-F206-4] Quality and Band Offset of the AlN thin films on Diamond (111) Deposited by RF-N-plasma-assisted MBE

〇Shozo Kono¹, Taisuke Kageura², Miki Kajiya², Kanami Kato², Jorge J. Buendia², Sora Kawai², Hiroshi Kawarada^1,2 (1.RONL, Waseda Univ., 2.Fac. Sci. Eng., Waseda Univ.)

Keywords:diamond, AlN thin film, RF plasma assisted MBE