[18p-P12-1~4] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[18p-P12-3] Correlation between formation condition of AlOx thin film by spin-coating and carrier lifetime

〇(B)Yuya Nakazawa¹, Yuichi Haruyama², Hiroyuki Kanda¹, Naoyuki Shibayama¹, Uzum Abdullah³, Seigo Ito¹ (1.Univ. of Hyogo, 2.LASTI, Univ. of Hyogo, 3.Karadeniz Tec. Univ.)

Keywords:passivation