[18p-P2-1~10] 6.5 Surface Physics, Vacuum

[18p-P2-8] Multilayer film production by porosity modulation of anodized porous alumina

〇Shinya Ogawa¹, Kiyoshi Kawamoto¹ (1.Hachinohe Inst.)

Keywords:optical thin film, anodization, aluminum

Anodized porous alumina has a structure in which vacancies are regularly arranged. In addition, the size, spacing, and porosity of the pores change with the applied voltage during anodic oxidation. That is, it is considered that it is possible to change the porosity by controlling the anodic oxidation conditions and to control the physical property values such as the refractive index. In this study, we tried to fabricate a λ / 4 multilayer film by changing the anodic oxidation conditions such as anodized porous alumina.