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[18p-P3-15] Characterization of thermoelectric power generation in Si-wire thermopile structure
Keywords:Seebeck coefficient, Si wire
In order to confirm the precision of constructed equipment for thermoelectric characteristics, we fabricated the thermopile structure with Si-wire array and evaluated its Seebeck coefficient and output power. It was confirmed that the Seebeck coefficient of one pair of p- and n-type Si wire is nearly equal to the sum of that of each p- and n-type wire. This indicates the formation of Si-wire thermopile structure.