[18p-P6-1~18] 13.2 Exploratory Materials, Physical Properties, Devices

[18p-P6-15] Evaluation of lattice displacement and residual hydrogen in GaN by rutherford backscattering and elastic recoil detection analysis

〇Kazuki Sato¹, Kazumasa Kushida², Tomoaki Nishimura¹, Kazuo Kuriyama¹, Toru Nakamura¹ (1.Hosei Univ., 2.Osakakyoiku Univ.)

Keywords:GaN