[19a-B303-1~10] 1.6 Ultrasonics

[19a-B303-5] Development of portable Ball SAW Moisture Analyzer by using USB Pulsar

〇Shingo Akao¹, Tatsuhiro Okano¹, Nobuo Takeda¹, Toshihiro Tsuji¹, Toru Oizumi¹, Hideyuki Fukushi¹, Nagisa Sato¹, Yusuke Tsukahara¹, Kazushi Yamanaka¹ (1.Ball Wave Inc.)

Keywords:surface acoustic wave, Moisture Analyzer, Ball SAW sensor

For the material of lithium ion battery or organic electro luminescence display easily reacts with water molecules, it is necessary to measure the trace moisture in the manufacturing process. Especially high speed response is required in the load lock chamber since outside air enters. In this study, we developed a portable ball SAW moisture analyzer by using USB pulsar providing high speed and low price. It is possible to measure the frost point down to -70 degrees Celsius. We demonstrated its on-site adaptability by using a dry box simulating the load lock chamber.