11:30 AM - 11:45 AM
[19a-C101-10] SiC Nanodots Formation in Poly-Si Substrate using Hot C+ Ion Implantation
Keywords:SiC, Hot Ion Implantation, Quantum dot
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology
Mon. Mar 19, 2018 9:15 AM - 11:45 AM C101 (52-101)
Kuniyuki Kakushima(Titech)
11:30 AM - 11:45 AM
Keywords:SiC, Hot Ion Implantation, Quantum dot