[19a-C103-1~12] 6.4 Thin films and New materials

▲ [19a-C103-2] Growth and gas sensing properties of TiO₂ nanostructures by MOD method

〇(PC)Leila Alipour¹, Tohru Sugahara¹, Jun-ichi Nakamura², Hironobu Ono², Nobuyuki Harada², Katsuaki Suganuma¹ (1.Osaka Univ., 2.Nihon Shokubai)

Keywords:Nanostructure, Gas sensing, MOD method

We focused on solution MOD method to fabricate nanostructured thin film oxides, to investigate gas sensing properties. Titanium oxide (TiO_x) nanostructured thin films were fabricated for gas sensor devices by MOD method, and their sensing properties with VOC vapors such as methanol, ethanol, and 1-propanol was tested.