[19a-C103-1~12] 6.4 薄膜新材料

▲ [19a-C103-2] Growth and gas sensing properties of TiO₂ nanostructures by MOD method

〇(PC)Leila Alipour¹、Tohru Sugahara¹、Jun-ichi Nakamura²、Hironobu Ono²、Nobuyuki Harada²、Katsuaki Suganuma¹ (1.Osaka Univ.、2.Nihon Shokubai)

キーワード：Nanostructure, Gas sensing, MOD method

We focused on solution MOD method to fabricate nanostructured thin film oxides, to investigate gas sensing properties. Titanium oxide (TiO_x) nanostructured thin films were fabricated for gas sensor devices by MOD method, and their sensing properties with VOC vapors such as methanol, ethanol, and 1-propanol was tested.