The 65h JSAP Spring Meeting, 2018

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6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19a-C104-1~12] 6.1 Ferroelectric thin films

Mon. Mar 19, 2018 9:00 AM - 12:15 PM C104 (52-104)

Hironori Fujisawa(Univ. of Hyogo), Takao Shimizu(Titech)

9:00 AM - 9:15 AM

[19a-C104-1] Fabrication of MEMS energy harvester based on multilayer PZT thin films

〇Shota Hirai1, Kensuke Kanda1, Sano Ryo1, Fujita Takayuki1, Maenaka Kazusuke1 (1.Univ. Hyogo)

Keywords:Piezoelectric MEMS, Multilayer PZT Thin Film, Energy Harvester