9:00 AM - 9:15 AM
[19a-G203-1] Suppression of channel shortening effect for InGaZnO Thin-Film-Transistor by In-Sn-O source/drain electrodes
Keywords:oxide semiconductor, low-resistivity region, SSRM
Oral presentation
13 Semiconductors » 13.5 Semiconductor devices and related technologies
Mon. Mar 19, 2018 9:00 AM - 12:00 PM G203 (63-203)
Masaharu Kobayashi(Univ. of Tokyo), Tetsuo Endoh(Tohoku Univ.)
9:00 AM - 9:15 AM
Keywords:oxide semiconductor, low-resistivity region, SSRM