[19a-P6-1~79] 17 Nanocarbon Technology（Poster）

[19a-P6-31] Low temperature growth of graphene on quartz substrates

〇Haruhisa Nakano¹, Yoshiaki Fukuda¹, Sadayuki Ukishima¹, Naoki Tsukahara¹ (1.ULVAC, Inc.)

Keywords:graphene, low temperature growth

We carried out the low temperature growth of graphene for the low temperature growth of GaN crystal for LED production. The graphene grown by thermal CVD at 550 degree C on a catalysis/quartz substrate was confirmed by Raman spectra. D band which shows the defect was observed in Raman spectra on graphene. The amount of defect was influenced by the kind of source gas.