The 65h JSAP Spring Meeting, 2018

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3 Optics and Photonics » 3.7 Laser processing

[19p-A404-1~19] 3.7 Laser processing

Mon. Mar 19, 2018 1:15 PM - 6:45 PM A404 (54-404)

Takehito Yoshida(National Institute of Technology, Anan College), Mitsuhiro Terakawa(Keio Univ.)

4:15 PM - 4:30 PM

△ [19p-A404-11] Investigation of femtosecond laser irradiation method for ohmic electrode formation on p-GaN

〇Hiroyuki Katayama1, Hiroki Kawakami1, Ryoya Imagaki1, Takuya Hashimoto1, Makoto Yamaguchi2, Yasuhiro Tanaka3, Yoshiki Naoi1, Tatsuya Okada1, Takuro Tomita1 (1.Tokushima Univ., 2.Akita Univ., 3.Kagawa Univ.)

Keywords:femtosecond laser, ohmic, electrode