[19p-B303-1~18] 11.4 Analog applications and their related technologies

[19p-B303-4] Resonator Q Factor and Fabrication Process of Microwave Multiplex Readout Circuits.

〇Hirotake Yamamori¹, Irimatsugawa Tomoya^2,1, Nakashima Yuki^1,3,2, Hirayama Fuminori¹, Sato Akira¹, Kohjiro Satoshi¹, Nagasawa Shuichi¹, Hidaka Mutsuo¹, Fujii Go¹, Ohno Masashi² (1.AIST, 2.Univ.of Tokyo, 3.ISAS/JAXA)

Keywords:TES, Microwave Multiplexed readout, Quality factor Q

We developed a microwave multiplexed readout circuit for a transition edge sensor (TES). However, the quality factor Q for the resonator significantly degraded during fabrication process of the chip integrated both resonators and SQUID circuits. We found that Pd film could not be completely removed along the edge of the resonator, which increased electric loss and decreased quality factor Q.