Property of MKID resonators using a high quality Nb film

Takashi Noguchi; Agnes Dominjon; Matthias Kroug

Presentation information

Oral presentation

11 Superconductivity » 11.4 Analog applications and their related technologies

[19p-B303-1~18] 11.4 Analog applications and their related technologies

Mon. Mar 19, 2018 1:15 PM - 6:15 PM B303 (53-303)

Masahiro Ukibe(AIST), Yuji Miyato(Osaka Univ.), Akira Kawakami(NICT)

2:15 PM - 2:30 PM

[19p-B303-5] Property of MKID resonators using a high quality Nb film

〇Takashi Noguchi¹, Agnes Dominjon¹, Matthias Kroug¹ (1.NAOJ)

Keywords:superconductor, microwave resonator, kinetic inductance

The Nb thin film deposited on the sapphire substrate heated to 800 ° C by DC sputtering showed high quality characteristics of transition temperature Tc = 9.4 K, RRR = 40 to 80 and resistivity ρ = 15.8 μΩcm. A superconducting resonator was made using the Nb thin film and an internal quality factor Q_i greater than 10⁶ was successfully obtained.