The 65h JSAP Spring Meeting, 2018

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Symposium (Oral)

Symposium » Advanced 3D atomic imaging to develop new materials and devices technologies

[19p-C103-1~8] Advanced 3D atomic imaging to develop new materials and devices technologies

Mon. Mar 19, 2018 1:45 PM - 5:45 PM C103 (52-103)

Kazuo Tsutsui(Tokyo Tech), Tomoteru Fukumura(Tohoku Univ.)

4:30 PM - 5:00 PM

[19p-C103-6] Local structural determination of N at SiO2/SiC interfaces by photoelectron diffraction

〇Daisuke Mori1,2, Fumihiko Matsui2 (1.Fuji Electric, 2.NAIST)

Keywords:semiconductor, SiC, interface